Search results for "metallic thin films"
showing 2 items of 2 documents
Unusual stoichiometry control in the atomic layer deposition of manganese borate films from manganese bis(tris(pyrazolyl)borate) and ozone
2016
The atomic layer deposition (ALD) of films with the approximate compositions Mn3(BO3)2 and CoB2O4 is described using MnTp2 or CoTp2 [Tp ¼ tris(pyrazolyl)borate] with ozone. The solid state decomposition temperatures of MnTp2 and CoTp2 are 370 and 340 C, respectively. Preparative-scale sublimations of MnTp2 and CoTp2 at 210 C/0.05 Torr afforded >99% recoveries with <0.1% nonvolatile residues. Self-limited ALD growth was demonstrated at 325 C for MnTp2 or CoTp2 with ozone as the coreactant. The growth rate for the manganese borate process was 0.19 A˚ /cycle within the ALD window of 300–350 C. The growth rate for the cobalt borate process was 0.39–0.42 A˚ /cycle at 325 C. X-ray diffraction of …
Rayleigh-instability-driven dewetting of thin Au and Ag films on indium-tin-oxide surface under nanosecond laser irradiations
2013
Investigations have been carried out on laser-beam-induced nanoparticle (NP) formation in thin (5 nm) Au and Ag films on indium-tin-oxide substrate. After the irradiation the films were observed to break-up into NPs through a dewetting mechanism. This mechanism was investigated as a Rayleigh-instability- driven process. In fact, for each used laser fluence, the resulting Au and Ag NPs' mean size and surface-to-surface mean distance were quantified and correlated between them in the framework of the Rayleigh-instability theory showing an excellent agreement. © The Institution of Engineering and Technology 2013.